US Patent No: 6,534,766

Number of patents in Portfolio can not be more than 2000

Charged particle beam system and pattern slant observing method

ALSO PUBLISHED AS: 20010025925

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Abstract

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A charged particle beam system comprising a charged beam source, a condenser lens, a scanning deflecting device, an objective lens and a secondary electron detector further comprises a slant observing deflecting device arranged between the objective lens and a sample. The slant observing deflecting device deflects charged particle beams immediately before the surface of the sample, to cause the charged particle beams to be slantingly incident on the sample. The deflection angle of the charged particle beams is controlled by a DC current component which is inputted to the slant observing deflecting device. The irradiation position shift of the charged particle beams due to the slant deflection is corrected and controlled by feeding an input value of the slant observing deflecting device and the slant angle of the charged particle beams back to the input value of the scanning deflecting device.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
KABUSHIKI KAISHA TOPCONTOKYO976
KABUSHIKI KAISHA TOSHIBATOKYO39185

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Abe, Hideaki Saitama, JP 129 764
Inoue, Masahiro Nara, JP 312 1495
Sugihara, Kazuyoshi Kanagawa, JP 49 603
Yamazaki, Yuichiro Tokyo, JP 125 759

Cited Art Landscape

Patent Info (Count) # Cites Year
 
HITACHI, LTD. (2)
5,894,124 Scanning electron microscope and its analogous device 28 1997
6,114,695 Scanning electron microscope and method for dimension measuring by using the same 31 1999
 
FEI COMPANY (1)
6,039,000 Focused particle beam systems and methods using a tilt column 38 1998
 
SII NANOTECHNOLOGY INC. (1)
5,023,453 Apparatus for preparation and observation of a topographic section 17 1989

Patent Citation Ranking

Forward Cite Landscape

Patent Info (Count) # Cites Year
 
ADVANCED PLASMONICS, INC. (37)
7,791,290 Ultra-small resonating charged particle beam modulator 0 2005
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7,876,793 Micro free electron laser (FEL) 2 2006
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HITACHI HIGH-TECHNOLOGIES CORPORATION (3)
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ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FUR HALBLEITERPRUFTECHNIK MBH (3)
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JEOL LTD. (1)
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NATIONAL INSTITUTE OF RADIOLOGICAL SCIENCES (1)
7,919,759 Charged particle beam irradiator and rotary gantry 1 2005

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