Charged particle beam system and pattern slant observing method

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 6534766
APP PUB NO 20010025925A1
SERIAL NO

09816468

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A charged particle beam system comprising a charged beam source, a condenser lens, a scanning deflecting device, an objective lens and a secondary electron detector further comprises a slant observing deflecting device arranged between the objective lens and a sample. The slant observing deflecting device deflects charged particle beams immediately before the surface of the sample, to cause the charged particle beams to be slantingly incident on the sample. The deflection angle of the charged particle beams is controlled by a DC current component which is inputted to the slant observing deflecting device. The irradiation position shift of the charged particle beams due to the slant deflection is corrected and controlled by feeding an input value of the slant observing deflecting device and the slant angle of the charged particle beams back to the input value of the scanning deflecting device.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
KABUSHIKI KAISHA TOPCONTOKYO773
KABUSHIKI KAISHA TOSHIBATOKYO21075

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Abe, Hideaki Yokohama, JP 100 1332
Inoue, Masahiro Zama, JP 234 2111
Sugihara, Kazuyoshi Kanagawa-Ken, JP 38 714
Yamazaki, Yuichiro Tokyo-To, JP 83 1095

Cited Art Landscape

Patent Info (Count) # Cites Year
 
M.C. ACQUISITION CORPORATION (1)
* 6039000 Focused particle beam systems and methods using a tilt column 55 1998
 
SII NANOTECHNOLOGY INC. (1)
* 5023453 Apparatus for preparation and observation of a topographic section 18 1989
 
HITACHI, LTD. (2)
* 5894124 Scanning electron microscope and its analogous device 28 1997
* 6114695 Scanning electron microscope and method for dimension measuring by using the same 33 1999
* Cited By Examiner

Patent Citation Ranking

Forward Cite Landscape

Patent Info (Count) # Cites Year
 
HITACHI HIGH-TECHNOLOGIES CORPORATION (6)
* 7009192 Charged particle beam application apparatus 7 2004
* 2004/0251,427 Charged particle beam application apparatus 1 2004
* 7705303 Defect inspection and charged particle beam apparatus 0 2008
* 2008/0142,712 Defect inspection and charged particle beam apparatus 2 2008
8304723 Defect inspection and charged particle beam apparatus 1 2010
* 2010/0187,416 DEFECT INSPECTION AND CHARGED PARTICLE BEAM APPARATUS 0 2010
 
JEOL LTD. (2)
* 7351971 Charged-particle beam instrument and method of detection 1 2006
* 2007/0018,100 Charged-particle beam instrument and method of detecting information from specimen using charged-particle beam 0 2006
 
APPLIED MATERIALS, INC. (1)
* 6936981 Retarding electron beams in multiple electron beam pattern generation 41 2002
 
ADVANCED PLASMONICS, INC. (53)
7791290 Ultra-small resonating charged particle beam modulator 1 2005
* 2007/0075,263 Ultra-small resonating charged particle beam modulator 27 2005
7626179 Electron beam induced resonance 6 2005
* 2007/0075,264 Electron beam induced resonance 49 2005
7619373 Selectable frequency light emitter 3 2006
7586097 Switching micro-resonant structures using at least one director 22 2006
* 2007/0154,846 Switching micro-resonant structures using at least one director 37 2006
* 2007/0152,176 Selectable frequency light emitter 38 2006
7714513 Electron beam induced resonance 6 2006
* 2007/0075,907 Electron beam induced resonance 4 2006
7558490 Resonant detector for optical signals 3 2006
7876793 Micro free electron laser (FEL) 4 2006
7646991 Selectable frequency EMR emitter 4 2006
7579609 Coupling light of light emitting resonator to waveguide 4 2006
* 2007/0264,023 Free space interchip communications 48 2006
8188431 Integration of vacuum microelectronic device with integrated circuit 0 2006
7986113 Selectable frequency light emitter 1 2006
7791291 Diamond field emission tip and a method of formation 1 2006
7746532 Electro-optical switching system and method 0 2006
7741934 Coupling a signal through a window 1 2006
7732786 Coupling energy in a plasmon wave to an electron beam 1 2006
7728397 Coupled nano-resonating energy emitting structures 11 2006
7728702 Shielding of integrated circuit package with high-permeability magnetic material 4 2006
7723698 Top metal layer shield for ultra-small resonant structures 0 2006
7718977 Stray charged particle removal device 2 2006
7710040 Single layer construction for ultra small devices 4 2006
7656094 Electron accelerator for ultra-small resonant structures 3 2006
7605835 Electro-photographic devices incorporating ultra-small resonant structures 2 2006
7586167 Detecting plasmons using a metallurgical junction 24 2006
7583370 Resonant structures and methods for encoding signals into surface plasmons 3 2006
7569836 Transmission of data between microchips using a particle beam 10 2006
7557647 Heterodyne receiver using resonant structures 3 2006
7554083 Integration of electromagnetic detector on integrated chip 10 2006
* 2007/0272,931 Methods, devices and systems producing illumination and effects 0 2006
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7758739 Methods of producing structures for electron beam induced resonance using plating and/or etching 0 2006
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7679067 Receiver array using shared electron beam 0 2006
7560716 Free electron oscillator 0 2006
* 2008/0073,590 Free electron oscillator 2 2006
7659513 Low terahertz source and detector 7 2006
* 2008/0149,828 Low terahertz source and detector 1 2006
7688274 Integrated filter in antenna-based detector 4 2007
7557365 Structures and methods for coupling energy from an electromagnetic wave 5 2007
7573045 Plasmon wave propagation devices and methods 14 2007
7990336 Microwave coupled excitation of solid state resonant arrays 1 2008
7791053 Depressed anode with plasmon-enabled devices such as ultra-small resonant structures 2 2008
8384042 Switching micro-resonant structures by modulating a beam of charged particles 1 2008
 
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH (5)
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* 7838830 Charged particle beam apparatus and method for operating a charged particle beam apparatus 0 2007
* 2008/0258,060 CHARGED PARTICLE BEAM APPARATUS AND METHOD FOR OPERATING A CHARGED PARTICLE BEAM APPARATUS 4 2007
 
HERMES MICROVISION, INC. (1)
9583306 Swing objective lens 0 2015
 
FMI TECHNOLOGIES, INC. (1)
7655934 Data on light bulb 1 2006
 
NATIONAL INSTITUTE OF RADIOLOGICAL SCIENCES (2)
* 7919759 Charged particle beam irradiator and rotary gantry 3 2005
* 2008/0006,776 Charged Particle Beam Irradiator and Rotary Gantry 8 2005
* Cited By Examiner