Microelectronic mechanical systems (MEMS) switch and method of fabrication
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United States of America Patent
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-
Mar 18, 2003
Grant Date -
Jun 20, 2002
app pub date -
Nov 6, 2001
filing date -
Nov 7, 2000
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A microelectronic mechanical systems (MEMS) switch includes a vane formed over a substrate for electrically coupling an input line to an output line formed on the substrate. The vane includes flexible hinges, which support the vane from the input line and allow the vane to rotate about a pivot axis. The substrate includes pull-down and pull-back electrodes to actuate the MEMS switch. The pull-back electrode allows the present invention to overcome stiction effects.
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