Microelectromechanical device with moving element
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United States of America Patent
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-
Mar 18, 2003
Issued Date -
N/A
app pub date -
Jul 19, 2000
filing date -
Jul 20, 1999
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A microelectromechanical (MEMS) device has a substrate, and a generally planar moving element, such as a mirror, disposed in parallel to the surface of the substrate. An actuator is operatively engageable with the moving element for selectively actuating the moving element between a first position in a plane horizontal to the surface of the substrate and a second position in that plane. The MEMS device may be effectively used as an optical switch. Various different actuators can be used. Preferably, the device is fabricated using a surface micromachining process.
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