Diamond coatings on reactor wall and method of manufacturing thereof

United States of America Patent

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Mar 25, 2003
Grant Date
Jul 4, 2002
app pub date
Dec 29, 2000
filing date
Dec 29, 2000

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Expired

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Abstract

A corrosion resistant component of semiconductor processing equipment such as a plasma chamber includes a diamond containing surface and process for manufacture thereof.

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LAM RESEARCH CORPORATION

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Inventor Name	Address	# of filed Patents	Total Citations
Chang, Christopher C	Sunnyvale, CA	27	1495
Daugherty, John E	Alameda, CA	33	2241
O'Donnell, Robert J	Alameda, CA	33	1850

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Diamond coatings on reactor wall and method of manufacturing thereof

Number of patents in Portfolio can not be more than 2000

United States of America Patent

09749925

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PATENT NO	6537429
APP PUB NO	20020086501A1
SERIAL NO	09749925
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity Expired	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
March 25, 2003	US,6537429,B2 US6537429B2	GRANTED PATENT AS SECOND PUBLICATION
July 04, 2002	US,20020086501,A1 US20020086501A1	FIRST PUBLISHED PATENT APPLICATION

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09749925

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