System and method for making smooth diagonal components with a digital photolithography system

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 6537738
SERIAL NO

09633978

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Abstract

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A digital photolithography system is provided that is capable of making smooth diagonal components. The system includes a computer for providing a first digital pattern to a digital pixel panel, such as a deformable mirror device (DMD). The DMD is capable of providing a first plurality of pixel elements for exposure onto a plurality of wafer sites. After exposure, the wafer can be scanned a distance less than the site length. The DMD then receives a second digital pattern for exposing a second plurality of pixel elements onto the plurality of sites of the subject. The exposed second plurality of pixel elements overlaps the exposed first plurality of pixel elements. This overlapping allows incremental changes to be made in the image being exposed, thereby accommodating the creation of diagonal components.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
DISCO CORPORATIONTOKYO567

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kanatake, Takashi Dallas, TX 25 361
Mei, Wenhui Plano, TX 30 849

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