US Patent No: 6,537,738

Number of patents in Portfolio can not be more than 2000

System and method for making smooth diagonal components with a digital photolithography system

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A digital photolithography system is provided that is capable of making smooth diagonal components. The system includes a computer for providing a first digital pattern to a digital pixel panel, such as a deformable mirror device (DMD). The DMD is capable of providing a first plurality of pixel elements for exposure onto a plurality of wafer sites. After exposure, the wafer can be scanned a distance less than the site length. The DMD then receives a second digital pattern for exposing a second plurality of pixel elements onto the plurality of sites of the subject. The exposed second plurality of pixel elements overlaps the exposed first plurality of pixel elements. This overlapping allows incremental changes to be made in the image being exposed, thereby accommodating the creation of diagonal components.

Loading the Abstract Image... loading....

First Claim

See full text

all claims..

Related Publications

Loading Related Publications... loading....

Patent Owner(s)

Patent OwnerAddressTotal Patents
DISCO CORPORATIONTOKYO399

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kanatake, Takashi Dallas, TX 29 292
Mei, Wenhui Plano, TX 38 649

Cited Art Landscape

Patent Info (Count) # Cites Year
 
BALL SEMICONDUCTOR, INC. (5)
5,949,557 Total internal reflection holography method and apparatus for lithography on 3-D spherical shaped integrated circuit 17 1998
6,052,517 Spherical cell design for VLSI circuit design on a spherical semiconductor 19 1998
6,071,315 Two-dimensional to three-dimensional VLSI design 15 1998
6,048,011 Apparatus for contactless capturing and handling of spherical-shaped objects 11 1998
6,061,118 Reflection system for imaging on a nonplanar substrate 14 1999
 
KODAK GRAPHIC COMMUNICATIONS CANADA COMPANY (3)
5,049,901 Light modulator using large area light sources 109 1990
5,132,723 Method and apparatus for exposure control in light valves 90 1991
5,818,498 Method of multi-channel thermal recording 23 1995
 
CREO SRL (2)
6,072,518 Method for rapid imaging of thermographic materials by extending exposure time in a single beam laser scanner 14 1997
6,107,011 Method of high resolution optical scanning utilizing primary and secondary masks 23 1999
 
FUJI PHOTO FILM CO., LTD. (2)
5,995,129 Image-wise exposure apparatus 11 1997
6,124,876 Image-wise exposure apparatus, mirror array device, and liquid crystal panel 23 1999
 
HITACHI, LTD. (2)
4,744,047 Pattern test apparatus including a plurality of pattern generators 37 1985
4,879,466 Semiconductor radiation detector 23 1988
 
INTERNATIONAL BUSINESS MACHINES CORPORATION (2)
5,461,455 Optical system for the projection of patterned light onto the surfaces of three dimensional objects 29 1993
5,909,658 High speed electron beam lithography pattern processing system 22 1996
 
NIPPON TELEGRAPH AND TELEPHONE CORPORATION (2)
5,300,966 Projector 39 1992
5,416,729 Generalized solids modeling for three-dimensional topography simulation 57 1994
 
TEXAS INSTRUMENTS INCORPORATED (2)
5,079,544 Standard independent digitized video system 343 1989
5,905,545 Full-color projection display system using two light modulators 75 1996
 
ULTRATECH STEPPER, INC. (2)
5,281,996 Photolithographic reduction imaging of extended field 75 1992
5,691,541 Maskless, reticle-free, lithography 143 1996
 
AAKI HOLDINGS (1)
5,955,776 Spherical shaped semiconductor integrated circuit 72 1997
 
BARCO GRAPHICS, NV (1)
6,204,875 Method and apparatus for light modulation and exposure at high exposure levels with high resolution 30 1998
 
BROTHER KOGYO KABUSHIKI KAISHA (1)
5,109,290 Image recording system for recording image plane comprising pixel area and non-pixel area 23 1991
 
CREO PRODUCTS INC. (1)
5,208,818 Laser system for recording data patterns on a planar substrate 69 1991
 
DISCO CORPORATION (1)
6,251,550 Maskless photolithography system that digitally shifts mask data responsive to alignment data 68 1999
 
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE (1)
6,084,656 Programmable mask for exposure apparatus 33 1998
 
FUJITSU LIMITED (1)
5,131,976 Josephson junction apparatus formed on flexible polymeric film and producing method thereof 19 1990
 
GENERAL ELECTRIC COMPANY (1)
5,082,755 Liquid crystal programmable photoresist exposure method for making a set of masks 25 1990
 
Goldstar Co., Ltd. (1)
5,121,983 Stereoscopic projector 107 1990
 
GREO PRODUCTS INC. (1)
5,995,475 Two dimensional laser diode array using multimode lasers 24 1997
 
INTEGRATED SYSTEMS, INC. (1)
5,361,272 Semiconductor architecture and application thereof 17 1992
 
KODAK I L, LTD. (1)
6,205,364 Method and apparatus for registration control during processing of a workpiece particularly during producing images on substrates in preparing printed circuit boards 18 1999
 
LOCKHEED MARTIN ENERGY RESEARCH CORPORATION (1)
5,892,231 Virtual mask digital electron beam lithography 21 1997
 
MASSACHUSETTS INSTITUTE OF TECHNOLOGY (1)
5,900,637 Maskless lithography using a multiplexed array of fresnel zone plates 58 1997
 
MICRON TECHNOLOGY, INC. (1)
5,998,069 Electrically programmable photolithography mask 60 1997
 
NIKON CORPORATION (1)
5,793,473 Projection optical apparatus for projecting a mask pattern onto the surface of a target projection object and projection exposure apparatus using the same 36 1997
 
SANDIA CORPORATION (1)
5,870,176 Maskless lithography 119 1997
 
SARCOS, L.C. (1)
5,269,882 Method and apparatus for fabrication of thin film semiconductor devices using non-planar, exposure beam lithography 51 1991
 
SARCOS, LC (1)
5,106,455 Method and apparatus for fabrication of micro-structures using non-planar, exposure beam lithography 80 1991
 
SPHERAL SOLAR POWER, INC. (1)
5,431,127 Process for producing semiconductor spheres 38 1994
 
TOYO TECHNOLOGIES, INC. (1)
6,014,203 Digital electron lithography with field emission array (FEA) 18 1998
 
TRANSAMERICA BUSINESS CREDIT CORPORATION (1)
5,138,368 Fabrication of printed wiring boards by projection imaging 26 1989
 
Other [Check patent profile for assignment information] (1)
6,133,986 Microlens scanner for microlithography and wide-field confocal microscopy 339 1997

Patent Citation Ranking

Forward Cite Landscape

Patent Info (Count) # Cites Year
 
ASML HOLDING N.V. (4)
7,777,861 Methods, systems, and computer program products for printing patterns on photosensitive surfaces 0 2007
7,773,199 Methods and systems to compensate for a stitching disturbance of a printed pattern 0 2007
7,630,054 Methods and systems to compensate for a stitching disturbance of a printed pattern 0 2007
7,688,423 Methods and systems to compensate for a stitching disturbance of a printed pattern in a maskless lithography system not utilizing overlap of the exposure zones 0 2008
 
DAINIPPON SCREEN MFG. CO., LTD. (4)
6,859,223 Pattern writing apparatus and pattern writing method 5 2003
7,190,435 Pattern writing apparatus and pattern writing method 1 2004
6,903,798 Pattern writing apparatus and pattern writing method 6 2004
7,268,856 Pattern writing apparatus and block number determining method 2 2006
 
MASKLESS LITHOGRAPHY, INC. (4)
7,167,296 Continuous direct-write optical lithography 16 2003
7,295,362 Continuous direct-write optical lithography 20 2004
7,719,753 Method of operation for SLM-based optical lithography tool 6 2007
7,508,570 Gray level method for slim-based optical lithography 16 2007
 
ORC MANUFACTURING CO., LTD. (2)
7,336,391 Multi-exposure drawing method and apparatus therefor 3 2002
7,136,087 Multi-exposure drawing method and apparatus therefor 3 2002
 
AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD. (1)
8,120,565 Method and apparatus to enhance contrast in electro-optical display devices 0 2004
 
KONINKLIJKE PHILIPS ELECTRONICS N.V. (1)
7,405,807 Method of forming optical images, apparatus for carrying out said method and process for manufacturing a device using said method 0 2004
 
MASKLESS LITOHGRAPHY, INC. (1)
7,639,416 Apparatus for SLM-based optical lithography with gray level capability 6 2007
 
ORBOTECH LTD. (1)
8,335,999 System and method for optical shearing 1 2010
 
RICOH COMPANY, LTD. (1)
7,075,562 Optical scanning device 4 2003

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
11.5 Year Payment $7400.00 $3700.00 $1850.00 Sep 25, 2014
Fee Large entity fee small entity fee micro entity fee
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00