Active electrostatic seal and electrostatic vacuum pump
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Mar 25, 2003
Grant Date -
N/A
app pub date -
Nov 2, 1999
filing date -
Nov 2, 1999
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An electrostatic device includes a conductive element and a dielectric element having surfaces that are closely-spaced or contacting, a plurality of electrodes positioned adjacent to and electrically isolated from the surface of the dielectric element and a voltage source for applying voltages to the electrodes. Either the conductive element or the dielectric element is flexible. The voltages applied to the electrodes produce a moving wave in the flexible element, wherein a gas between the surfaces is transported in the direction of the moving wave. The device may function as an active electrostatic seal between the surfaces or as an electrostatic vacuum pump.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully