Fiber-optic pressure sensor, variants and method for producing a resilient membrane

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United States of America Patent

PATENT NO 6539136
SERIAL NO

09719834

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Abstract

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The inventions relate to measurements of a hydrostatic and/or fast-changing pressure by optical means, and are suitable for aerodynamic investigations of aircraft and small spacecraft, in robotics, including small force micro-clamps, in remote pressure monitoring (in wells, vessels, cylinders), in medicine and medical and biological investigations, hydroacoustics, security systems. The object is to improve the sensitivity and enhance the temperature and vibration stability of a pressure sensor. The pressure sensor is a low Q-factor Fabry-Perot cavity/interferometer 6 at the end of a single-mode optical fiber 1 with the 4% Fresnel reflection from the silica glass/air interface. Another movable mirror of the cavity is formed by an end face 10 of a short (1-3 mm) optical fiber length 9 having a small inertial mass and inserted into the center of a flexible membrane 9 of 500-700 .mu.m in diameter, tightly sealing a small air volume of about 1-3 mm.sup.3 inside a second capillary 3 with the external diameter of 0.5 to 0.9 mm. End faces 7 and 10 of the optical fibers 1 and 9 forming the Fabry-Perot cavity 6 with a gap of about 50 .mu.m are placed inside the capillary 2 with the internal diameter of about 145 .mu.m. The temperature stability of the sensor is .DELTA.P/.DELTA.T.apprxeq.0.001 atm/.degree. C.

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Patent Owner(s)

Patent OwnerAddress
NAUCHNY TSENTR VOLOKONNOI OPTIKI PRI INSTITUTE OBSCHEI FIZIKI ROSSIISKOI AKADEMII NAUKMOSCOW RUSSIAN FEDERATION MOSCOW MOSCOW 125047

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Belovolov, Mikhail Ivanovich Moscow, RU 2 59
Bubnov, Mikhail Mikhailovich Moscow, RU 2 59
Dianov, Evgeny Mikhailovich Moscow, RU 8 237
Semenov, Sergei Lvovich Mytischi, RU 3 79

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