Integrated palladium-based micromembranes for hydrogen separation and hydrogenation/dehydrogenation reactions
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United States of America Patent
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Apr 1, 2003
Grant Date -
N/A
app pub date -
Dec 2, 1999
filing date -
Dec 2, 1998
priority date (Note) -
Expired
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Abstract
The present invention relates to gas separation membranes including a metal-based layer having sub-micron scale thicknesses. The metal-based layer can be a palladium alloy supported by ceramic layers such as a silicon oxide layer and a silicon nitride layer. By using MEMS, a series of perforations (holes) can be patterned to allow chemical components to access both sides of the metal-based layer. Heaters and temperature sensing devices can also be patterned on the membrane. The present invention also relates to a portable power generation system at a chemical microreactor comprising the gas separation membrane. The invention is also directed to a method for fabricating a gas separation membrane. Due to the ability to make chemical microreactors of very small sizes, a series of reactors can be used in combination on a silicon surface to produce an integrated gas membrane device.
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