Structure and method for electrical isolation of optoelectronic integrated circuits
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United States of America Patent
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Apr 8, 2003
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N/A
app pub date -
Dec 27, 1999
filing date -
Dec 27, 1999
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Abstract
Semiconductor devices in an optoelectronic integrated circuit are electrically isolated from each other by using planar lateral oxidation to oxidize a buried semiconductor layer vertically separating the semiconductor devices.
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