Method and apparatus for detecting defects along the edge of electronic media
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Apr 8, 2003
Grant Date -
N/A
app pub date -
Jun 29, 2001
filing date -
Jul 7, 2000
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An electronic media edge defect detector in one form has plural light sources and detectors arranged to direct and receive deflected light from the side edge margins and outer edge margins of the electronic media. The detected light is analyzed to detect the presence of defects. Individual wafers may be raised while in a cassette and turned during the inspection without removing the wafers from the cassette.
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