Structure and method for planar lateral oxidation in passive devices

United States of America Patent

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Apr 15, 2003
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Jul 4, 2002
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Dec 27, 1999
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Dec 27, 1999

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Abstract

A passive semiconductor device structure is made using planar lateral oxidation to define a buried oxidized semiconductor structure such as a passive waveguide, microlens or DBR mirror stack.

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MAJANDRO LLC	6009 W PARKER RD STE 149 - 1086 PLANO TX 75093

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H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....

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Inventor Name	Address	# of filed Patents	Total Citations
Chua, Christopher L	San Jose, CA	168	3015
Floyd, Philip D	Sunnyvale, CA	75	3115
Paoli, Thomas L	Los Altos, CA	91	2667
Sun, Decai	Sunnyvale, CA	61	2610

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Structure and method for planar lateral oxidation in passive devices

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United States of America Patent

09473108

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PATENT NO	6548908
APP PUB NO	20020084525A1
SERIAL NO	09473108
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
April 15, 2003	US,6548908,B2 US6548908B2	GRANTED PATENT AS SECOND PUBLICATION
July 04, 2002	US,20020084525,A1 US20020084525A1	FIRST PUBLISHED PATENT APPLICATION

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09473108

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