Method for determining a position of a structural element on a substrate
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United States of America Patent
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Apr 15, 2003
Grant Date -
N/A
app pub date -
Feb 2, 1999
filing date -
Jun 10, 1998
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A method and apparatus determines the position P of a structural element that is non-orthogonal relative to the coordinate axes (x, y) of a substrate. The structural element is imaged on a detector array of a CCD camera that has a reference point. With the aid of a measuring window that is rotated at an angle .theta. to the substrate coordinate system, the position P.sub.IPC of one edge of the structural element is determined relative to the reference point. The position L of the reference point relative to the origin of the substrate coordinate system is determined from the angle .THETA. and the current measuring stage coordinates, so that for a particular position P, P=P.sub.IPC +L, where L=x.multidot.cos .theta.y.multidot.sin .theta..
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