Isolation technique for pressure sensing structure
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United States of America Patent
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Apr 22, 2003
Grant Date -
N/A
app pub date -
Jan 19, 2000
filing date -
Jan 19, 2000
priority date (Note) -
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status (Latency Note)
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Abstract
An electronic pressure-sensing device is isolated from corrosive, conductive gasses and fluids by a corrosion resistant metal diaphragm welded to a pressure port. The pressure-sensing device is attached to a support structure with a hole that provides a path from the diaphragm area to the pressure-sensing device. A fill fluid is sealed behind the diaphragm and fills the hole through the support structure to the electronic pressure-sensing device. In this design, any hostile chemical applied is completely isolated from the electronic sensor and associated adhesive seals by the metal diaphragm.
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