Interlocking cylindrical magnetron cathodes and targets
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Apr 22, 2003
Grant Date -
Apr 11, 2002
app pub date -
Sep 24, 2001
filing date -
Sep 25, 2000
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A cylindrical magnetron having a cylindrical cathode surrounding a cylindrical target. The cathode is without features extending inwards thereof at either end such that the target may be axially removed from or installed into the cathode from either end. The target is positioned and axially retained within the cathode by resilient means operative between the outer surface of the target and the inner surface of the cathode. The invention is especially useful in magnetron assemblies having a plurality of abutting, coaxially disposed magnetrons, wherein all the targets may be removed and replaced from the cathode assembly without requiring disassembly and reassembly of the cathodes.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully