Spherical silica particles and method of production

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United States of America Patent

PATENT NO 6551567
APP PUB NO 20020041963A1
SERIAL NO

09929097

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Abstract

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Spherical, non-crystalline silica particles made by burning a non-halogenated siloxane starting material are substantially halogen-free, and have a content of metallic impurities other than silicon of not more than 1 ppm, a particle size of 10 nm to 10 .mu.m and a specific surface area of 3-300 m.sup.2 /g. Production of the particles is carried out by oxidative combustion of the non-halogenated siloxane in a flame at a high adiabatic flame temperature to effect the formation of a large number of core particles and promote their coalescence and growth.

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Patent Owner(s)

Patent OwnerAddress
SHIN-ETSU CHEMICAL CO LTDTOKYO 100-0004

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Konya, Yoshiharu Annaka, JP 14 139
Ueno, Susumu Annaka, JP 110 1330
Watanabe, Koichiro Annaka, JP 87 1137

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