Use of gate electrode workfunction to improve DRAM refresh

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United States of America Patent

PATENT NO 6552401
SERIAL NO

09721697

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Abstract

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This invention relates to a method and resulting structure, wherein a DRAM may be fabricated by using silicon midgap materials for transistor gate electrodes, thereby improving refresh characteristics of access transistors. The threshold voltage may be set with reduced substrate doping requirements. Current leakage is improved by this process as well.

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Patent Owner(s)

  • MICRON TECHNOLOGY, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dennison, Charles H San Jose, CA 269 8606

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