Flying image of a maskless exposure system
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
Apr 22, 2003
Grant Date -
Dec 6, 2001
app pub date -
May 23, 2001
filing date -
May 25, 2000
priority date (Note) -
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status (Latency Note)
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Abstract
A system for image-scanning a pixel-mask pattern onto a subject, such as a subject in digital photolithography, is provided. The system includes a pixel panel for generating a pixel pattern formed of pixel elements. A lens system positioned between the panel and the subject simultaneously directs the pixel elements to the subject. A mirror positioned between the panel and the subject enables the system to direct the pixel elements to a portion of the subject at any one time. A computing system may be used to generate the pixel elements and provide the pixel elements to the panel in a predetermined sequence.
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