Importance

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Abstract

An improved micromechanical device, particularly a micromirror device having improved electrostatic efficiency. A deflectable member comprised of a mirror 302 and an active hinge yoke 306 is suspended address 308 and landing electrodes 312 on a substrate 310 and above upper address electrodes supported above the substrate 310. The deflectable member is operable to rotate about a torsion hinge axis in response to an electrostatic force between the address electrodes and the deflectable member. The upper address electrodes have a stair stepped shape to narrow a gap between the deflectable member and the upper address electeodes. The gap is narrower near the axis of rotation 810 compared to away from the axis. The stair stepped shape is achieved by embedding a portion of an oxide layer 804 between a thin metal layer 806 making up the upper address electrodes 806, the active hinge yoke 306, and the torsion hinges, and a thick metal layer 808 making up the upper address electrodes 806 and the active hinge yoke 306.

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First Claim