Process and apparatus for blending and distributing a slurry solution
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United States of America Patent
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Apr 29, 2003
Issued Date -
N/A
app pub date -
Feb 9, 2001
filing date -
Dec 28, 2000
priority date (Note) -
Expired
status (Latency Note)
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Abstract
On-site blending and distribution of oxide abrasives with other constituents as used in semiconductor applications. Constituent blending is accomplished through weighing components individually into a blending tank. Some components may be added by injection or weight. Alternatively blends can be made to varying concentrations by passing the blended oxide solution in a closed circulation loop through a calibrated encapsulated torroid coil to measure electrical conductivity. The resulting conductivity output may be used to add one or more component.
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