Process for producing thin film metal oxide coated substrates
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United States of America Patent
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Apr 29, 2003
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N/A
app pub date -
May 18, 2001
filing date -
May 18, 2001
priority date (Note) -
Expired
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Abstract
Processes for coating three dimensional inorganic substrates, with shielded surfaces, with metal oxide-containing coatings are disclosed. Such processes comprise contacting a substrate with a metal oxide precursor reactant mixture at fast reaction and elevated temperature reaction conditions to form a substrate containing metal oxide on at least a portion of the three dimensions and shielded surfaces of the substrate. Also disclosed are substrates coated with metal oxide-containing coatings for use in various applications including catalysis, shielding, electrostatic dissipation and battery applications.
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