Plasma enhanced sheet bonding method and device
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United States of America Patent
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Apr 29, 2003
Grant Date -
N/A
app pub date -
Nov 19, 2001
filing date -
Nov 19, 2001
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A method and apparatus for bonding solid sheets together is presented. A modulated directional flow of plasma is applied at and between the bonding surfaces of the sheets to be bonded prior to and during the application of pressure to compress the bonding surfaces together to form a direct contact or diffusion bond.
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