Pulsed source scanning interferometer
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United States of America Patent
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Apr 29, 2003
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app pub date -
Feb 17, 2000
filing date -
Feb 17, 2000
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Abstract
A pulsed light source in used conjunction with a ramping scanning mechanism for phase-shift and vertical-scanning interferometry. The pulse length and the scanning velocity are selected such that a minimal change in OPD occurs during the pulse. As long as the duration of the pulse is shorter than the detector's integration time, the effective integration time and the corresponding phase shift are determined by the length of the pulse, rather than the detector's characteristics. The resulting minimal phase shift produces negligible loss of fringe modulation, thereby greatly improving signal utilization during phase-shifting and vertical-scanning interferometry.
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