MEMS based variable optical attenuator (MBVOA)
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United States of America Patent
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Apr 29, 2003
Grant Date -
Jun 27, 2002
app pub date -
Nov 2, 2001
filing date -
Nov 3, 2000
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The present invention discloses an optimized optical attenuator device. It includes the design of resonator formed by two identical mirrors, which are made by MEMS process. The structure realizes the minimum insertion loss. The two membranes are chosen to be with high reflection rate. Multiple layer or metal layer or mixture of them can produce membrane of high reflection rate. High reflection rate causes low tuning voltage for one certain attenuation range.
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