Method to construct variable-area capacitive transducers
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United States of America Patent
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Apr 29, 2003
Issued Date -
N/A
app pub date -
Apr 13, 2001
filing date -
Mar 10, 1998
priority date (Note) -
Expired
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Abstract
A method to construct a capacitive transducers comprising the steps of forming over and in a planar surface of a substrate at least one rigid electrode of a variable-area capacitor electrically connected to a location on said substrate reserved for electrode attachment; providing a cooperating flexible electrode with a dielectric layer; and bonding said flexible electrode to said substrate in a surface region surrounding said rigid electrode.
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