MEMS optical switch with torsional hinge and method of fabrication thereof
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Apr 29, 2003
Grant Date -
N/A
app pub date -
Oct 25, 2000
filing date -
Oct 25, 2000
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
In at least one embodiment, an apparatus having a first structure, a second structure, and a hinge coupled between the first and second structures. The hinge has a first flexible member aligned substantially along an axis. The hinge is arranged so that the second structure can rotate relative to the first structure substantially about the axis. The hinge can also include a second flexible member aligned substantially along the axis. The first and second flexible members being positioned on opposite sides of the second structure. In at least one embodiment, a method includes steps of fabrication of the apparatus.
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