Method and apparatus for interfacing a statistical process control system with a manufacturing process control framework
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United States of America Patent
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Apr 29, 2003
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N/A
app pub date -
Jun 16, 2000
filing date -
Jun 16, 2000
priority date (Note) -
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Abstract
The present invention provides for a method and an apparatus for interfacing a statistical process control system with a manufacturing control system. A manufacturing model is defined. A processing run of semiconductor devices is processed in a manufacturing facility as defined by the manufacturing model. An advanced process control analysis is performed on the processed semiconductor devices. A statistical process control analysis is performed on the processed semiconductor devices. The manufacturing facility is modified in response to the advanced process control analysis and the statistical process control analysis.
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