Method of fabricating an electrostatic chuck
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United States of America Patent
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May 6, 2003
Issued Date -
N/A
app pub date -
May 29, 1998
filing date -
Feb 22, 1994
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A method of fabricating an electrostatic member 33 for holding a substrate 45 in a process chamber 80 containing erosive process gas. The method comprises the steps of forming an electrostatic member 33 comprising an insulator or dielectric layer 35 covering an electrically conductive layer, and shaping the electrostatic member 33 to form a dielectric covered electrode and an electrical connector 55 attached to the dielectric covered electrode 50 to conduct charge to the dielectric covered electrode 50.
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