Substrate processing apparatus
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United States of America Patent
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May 6, 2003
Grant Date -
Oct 24, 2002
app pub date -
Apr 18, 2002
filing date -
Apr 19, 2001
priority date (Note) -
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Abstract
A substrate processing apparatus includes a coating section, a developing section, a heat-treating section and a transport mechanism. The coating section has first processing units each for performing a coverage process to supply a photoresist solution to a substrate and cover a surface of the substrate with the photoresist solution, a second processing unit for spinning the substrate, after the coverage process, at high speed to make the photoresist solution into a film, dry the photoresist film, and clean the substrate. All substrates are processed with the same coating conditions to suppress differences in quality among the substrates. The first and second processing units perform the respective processes concurrently to improve the throughput of substrate processing.
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