Optical switch
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United States of America Patent
Stats
-
May 6, 2003
Grant Date -
May 16, 2002
app pub date -
Nov 14, 2001
filing date -
Nov 15, 2000
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An optical switch that any vibration or oscillation transmitted to the optical switch from the outside is substantially prevented from being transmitted to a movable electrode is provided. In an optical switch comprising: a stationary electrode; a movable electrode opposed to the stationary electrode with a predetermined space therebetween; and a mirror mounted to the movable electrode, wherein the movable electrode and the mirror are moved together by applying a voltage between the stationary electrode and the movable electrode thereby to switch the path of an incident optical signal to the optical switch, a buffer member provided with a diaphragm is attached to the bottom of the stationary electrode, and a vibration or oscillation is substantially prevented from being transmitted to the movable electrode by the damping effects of the diaphragm and the space area formed above the diaphragm.
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