Importance

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Abstract

An illumination optical system includes an optical integrator for forming a secondary light source by use of light from a light source, an optical system for directing light from the light source toward the integrator, and a condensing optical system for condensing light from the optical integrator upon a surface to be illuminated. The condensing optical system includes (i) a first lens group having plural lenses movable along an optical axis direction, for adjusting an illuminance distribution of light from the secondary light source upon the surface to be illuminated, without changing an angular distribution of the light from the secondary light source upon the surface to be illuminated, and (ii) a second lens group having plural lenses movable along the optical axis direction, for adjusting the angular distribution of the light from the secondary light source upon the surface to be illuminated, without changing the illuminance distribution of the light from the secondary light source upon the surface to be illuminated.

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First Claim