Importance

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Abstract

A thermal actuator is taught for a micro-electromechanical device. The thermal actuator includes a base element, a cantilevered element extending from the base element and normally residing in a first position. The cantilevered element includes a first layer constructed of a dielectric material having a low thermal coefficient of expansion and a second layer attached to the first layer, the second layer comprising intermetallic titanium aluminide. A pair of electrodes are connected to the second layer to allow an electrical current to be passed through the second layer to thereby cause the temperature of the second layer to rise, the cantilevered element deflecting to a second position as a result of the temperature rise of the second layer and returning to the first position when the electrical current through the second layer is ceased and the temperature thereof decreases. The thermal actuator has particular application in an inkjet device wherein a series of such inkjet devices form an inkjet printhead.

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First Claim