Plasma focus light source with tandem ellipsoidal mirror units

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 6566668
SERIAL NO

09875721

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A high energy photon source. A pair of plasma pinch electrodes are located in a vacuum chamber. The chamber contains a working gas which includes a noble buffer gas and an active gas chosen to provide a desired spectral line. A pulse power source provides electrical pulses at repetition rates of 1000 Hz or greater and at voltages high enough to create electrical discharges between the electrodes to produce very high temperature, high density plasma pinches in the working gas providing radiation at the spectral line of the source or active gas. A fourth generation unit is described which produces 20 mJ, 13.5 nm pulses into 2 .pi. steradians at repetition rates of 2000 Hz with xenon as the active gas. This unit includes a pulse power system having a resonant charger charging a charging capacitor bank, and a magnetic compression circuit comprising a pulse transformer for generating the high voltage electrical pulses at repetition rates of 2000 Hz or greater.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

  • ASML NETHERLANDS B.V.

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Birx, Daniel L late of Potomac, MD 27 1610
Fomenkov, Igor V San Diego, CA 156 5458
Melnychuk, Stephan T Carlsbad, CA 7 393
Ness, Richard M San Diego, CA 52 2455
Partlo, William N Poway, CA 183 6728
Rauch, John E Poway, CA 3 156
Sandstrom, Richard L Encinitas, CA 136 5419

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation