Method of providing differential frequency adjusts in a thin film bulk acoustic resonator (FBAR) filter and apparatus embodying the method
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United States of America Patent
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May 20, 2003
Grant Date -
Sep 5, 2002
app pub date -
Mar 5, 2001
filing date -
Mar 5, 2001
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A method for fabricating a resonator, and in particular, a thin film bulk acoustic resonator (FBAR), and a resonator embodying the method are disclosed. A resonator is fabricated on a substrate, and its top electrode 56 is oxidized to form a oxide layer 58. For a substrate having multiple resonators, the top electrode 56 of only selected resonator is oxidized to provide resonators having different resonance frequencies on the same substrate.
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