Method and apparatus for monitoring consumable performance
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United States of America Patent
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May 20, 2003
Grant Date -
N/A
app pub date -
Jul 28, 2000
filing date -
Jul 28, 2000
priority date (Note) -
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Abstract
A method for monitoring consumable performance in a processing tool comprises storing a performance model of the processing tool; receiving a consumable item characteristic of a consumable item in the processing tool; determining a predicted processing rate for the processing tool based on the consumable item characteristic and the performance model; determining an actual processing rate of the processing tool; and determining a replacement interval for the consumable item based on at least the actual processing rate. A processing system includes a processing tool and an automatic process controller. The processing tool is adapted to process wafers and includes a consumable item.
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