Judging method and processing apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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May 27, 2003
Grant Date -
Mar 7, 2002
app pub date -
Jul 30, 2001
filing date -
Jul 31, 2000
priority date (Note) -
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status (Latency Note)
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Abstract
The present invention is a method of judging whether a substrate is accurately placed at a predetermined position when placing the substrate at the predetermined position on a plate to perform heat treatment or cooling treatment therefor. The present invention has the step of measuring temperature of the plate at least from a first point of time to a second point of time during which the plate temperature changes, after placing the substrate at the plate, the step of calculating a temperature integrated area I determined by a range enclosed the measured temperature curve changing in time sequence and a set temperature of the plate, and the step of comparing the calculated temperature integrated area I with threshold values of a temperature integrated area set in advance.
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