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Abstract

An oxide-confined vertical cavity surface emitting laser having reduced parasitic capacitance. The VCSEL includes a substrate having a first mirror stack grown epitaxially thereon. The first mirror stack includes a plurality of semiconductor layers and is doped with a first doping type. An active region is grown epitaxially above the first mirror stack for generating a lasing emission. A control layer is grown epitaxially above the first mirror stack, between first mirror stack and the active region or above the active region, and includes a central non-oxidized conducting portion and an outer, laterally oxidized insulating portion. A second mirror stack is grown epitaxially above the active region and the control layer. The second mirror stack includes a second plurality of semiconductor layers doped with a second doping type. The second plurality of semiconductors layers includes pairs of high index and low index materials. The low index material layers are generally equally laterally oxidized and have a non-oxidized central portion. The penetration of the lateral oxidation of the low index material layers is less than the oxidation penetration for the outer laterally oxidized insulating portion of the control layer.

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First Claim