US Patent No: 6,572,944
Number of patents in Portfolio can not be more than 2000
Structure for fabricating a special-purpose die using a polymerizable tape
Stats
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Jun 3, 2003
Issued date -
Jan 16, 2001
filing date -
09/764,190
serial no -
In Force
status
Importance
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Abstract
A structure for protecting a special-purpose area of an image sensor die or a micromachine die during singulation of the die from a wafer includes a protective layer that has a polymerized upper zone and an unpolymerized lower zone. At least part of the unpolymerized lower zone has an adhesive lower surface that is attached to a top surface of the wafer so that the protective layer overlies and protects the special-purpose area during either frontside or backside sawing. The unpolymerized lower zone is then entirely polymerized to make the adhesive lower surface nonadhesive to facilitate removal of the protective layer from the die.
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First Claim
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International Classification(s)
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Cited Art
| Patent Info | (Count) | # Cites | Year |
|---|---|---|---|
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| 5,362,681 Method for separating circuit dies from a wafer | 92 | 1992 | |
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| 6,245,593 Semiconductor device with flat protective adhesive sheet and method of manufacturing the same | 46 | 1999 | |
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| 5,981,361 Fabrication process of a semiconductor device including a dicing process of a semiconductor wafer | 21 | 1997 | |
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| 6,176,966 Method of die bonding electronic component and die bonding apparatus thereof | 50 | 1998 | |
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| 6,425,971 Method of fabricating devices incorporating microelectromechanical systems using UV curable tapes | 32 | 2000 | |
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| 5,641,714 Method of manufacturing members | 47 | 1996 | |
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| 5,435,876 Grid array masking tape process | 98 | 1993 | |
Patent Citation Ranking
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Dec 3, 2014 |
| Fee | Large entity fee | small entity fee | micro entity fee |
|---|---|---|---|
| Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
| Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
| Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |