Zirconium nitride and yttrium nitride solid solution composition

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United States of America Patent

PATENT NO 6573209
SERIAL NO

09687940

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Abstract

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The present invention relates to oxides on suitable substrates, as converted from nitride precursors. A composition comprising a solid solution of zirconium nitride and yttrium nitride (YZN) represented by the formula (Zr.sub.x Y.sub.1-x)N where x is a value from 0.1 to 0.9 is also disclosed.

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APPLIED THIN FILMS INC1801 MAPLE AVENUE SUITE 5316 EVANSTON IL 60201

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Barnett, Scott A Evanston, IL 23 414
Kim, Ilwon Skokie, IL 8 104
Rechner, John Wilmette, IL 5 66
Sambasivan, Sankar Chicago, IL 36 689

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