Removable optical pellicle
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United States of America Patent
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Jun 3, 2003
Grant Date -
Jan 30, 2003
app pub date -
Jul 26, 2001
filing date -
Jul 26, 2001
priority date (Note) -
In Force
status (Latency Note)
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Abstract
Optical pellicles for photomasks are described, where the optical pellicle is configured to be reversibly affixed to the photomask with a non-adhesive mounting member, such as a vacuum system or an electrostatic film. The optical pellicles of the invention are readily removed from the photomask and reattached without the use of adhesives, and are well-suited for use by automated methods.
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