Microelectromechanical systems device and method for fabricating same
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United States of America Patent
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Jun 3, 2003
Grant Date -
N/A
app pub date -
Feb 27, 2002
filing date -
Feb 27, 2002
priority date (Note) -
Reissued
status (Latency Note)
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Abstract
One aspect of the invention provides a method for fabricating a microelectromechanical systems device. The method comprises fabricating an array of first elements, each first element conforming to a first geometry; fabricating at least one array of second elements, each second element conforming to a second geometry; wherein fabricating the arrays comprises selecting a defining aspect of each of the first and second geometries based on a defining characteristic of each of the first and second elements; and normalizing differences in an actuation voltage required to actuate each of the first and second elements, wherein the differences are as a result of the selected defining aspect, the defining characteristic of each of the elements being unchanged.
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