Protective gas shield apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
Jun 10, 2003
Grant Date -
N/A
app pub date -
May 19, 2000
filing date -
May 21, 1999
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A gas shield assembly for protecting an exposed surface of an injector in a chemical vapor deposition system. The shield assembly includes a back wall which supports perforated sheets to define a plenum. The sheets are held in place by endcaps. A conduit delivers gas to the plenum. The conduit includes a stretch extending along the back wall and has a bend adjacent the ends of the back wall. The conduit includes perforations along the stretch and at the bends to provide substantially uniform flow of gas into the plenum and the ends.
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