Vertical semiconductor component with source-down design and corresponding fabrication method

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United States of America Patent

PATENT NO 6576953
SERIAL NO

09768015

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The present invention provides a semiconductor component having a substrate (10) of a first conduction type (n.sup.+); provided on the substrate (10), an optional first layer (20) of the second conduction type (p.sup.+) as body connection region; provided on the first layer (20) or the substrate (10), a second layer (30) of the second conduction type (p) as body region; provided on the second layer (30), a third layer (40) of the first conduction type (n) as drain region; a trench (140) reaching down to the substrate (10); a gate structure (90, 100) provided in the trench (140); and a source region (130) of the first conduction type (n.sup.+), said source region being provided in the second layer (30) in the periphery of the trench (140); the source region (130) being short-circuited with the first layer (20) and the substrate (10) by a conductive layer (120) provided in the lower region of the trench.

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Patent Owner(s)

  • INFINEON TECHNOLOGIES AG

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hirler, Franz Isen, DE 429 5074

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