Reflective spectral filtering of high power extreme ultra-violet radiation
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United States of America Patent
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Jun 10, 2003
Grant Date -
Mar 27, 2003
app pub date -
Sep 27, 2001
filing date -
Sep 27, 2001
priority date (Note) -
Expired
status (Latency Note)
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Abstract
In one embodiment of the invention, a grating structure etched on a mirror substrate has a grating period causing diffracting, out of an optical path, a first incident radiation within a first band around a first wavelength. A multi-layer coating deposited on the grating structure reflects the first incident radiation, in the optical path, within the first band and a second incident radiation within a second band around a second wavelength. In another embodiment, a first multi-layer coating deposited on a mirror substrate reflects a first incident radiation within a first band around a first wavelength and a second incident radiation, in an optical path, within a second band around a second wavelength. A grating structure is deposited on the first multi-layer coating. The grating structure is etched to have a grating period causing diffracting, out of the optical path, the second incident radiation within the second band.
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