Method of detecting and controlling in-situ faults in rapid thermal processing systems
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United States of America Patent
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Jun 10, 2003
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N/A
app pub date -
Mar 30, 1999
filing date -
Mar 30, 1999
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Abstract
Faults occurring in the operation of a rapid thermal process system are detected and dynamically controlled in-situ. A data set is generated which represents the power applied to heating elements which are spatially arranged in a plurality of zones. The data is converted to a sequence of fractions respectively representing the power applied to each zone relative to the total applied power. The fractions are sequentially arranged and a least squares straight line fit for the fractions is calculated. The slope of the calculated straight line fit is used in a statistical process control system to determine whether a fault has occurred, and to make appropriate corrections in process control parameters, such as the length of time the process is carried out.
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