Method for constructing a membrane probe using a depression

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United States of America Patent

PATENT NO 6578264
SERIAL NO

09546927

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Abstract

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A method for constructing a membrane probe that includes providing a substrate, and creating a depression within the substrate. Conductive material is located within the depression and a conductive trace is connected to the conductive material. A membrane is applied to support the conductive material and the substrate is removed from the conductive material.

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Patent Owner(s)

Patent OwnerAddress
FORMFACTOR BEAVERTON INC9100 SW GEMINI DRIVE BEAVERTON OR 97008

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bayne, Michael A Beaverton, OR 17 345
Gleason, Reed Portland, OR 17 352
Smith, Kenneth Portland, OR 131 2171

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