Structure for protecting a micromachine with a cavity in a UV tape
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United States of America Patent
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-
Jun 17, 2003
Grant Date -
N/A
app pub date -
Mar 14, 2001
filing date -
Mar 14, 2001
priority date (Note) -
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status (Latency Note)
Importance
Abstract
A protective layer includes a polymerized region, which forms a cavity in an interior surface of the protective layer. The protective layer is mounted to a micromachine chip such that an active area of the micromachine chip is located within the cavity of the protective layer. The protective layer protects the active area during front-side or back-side singulation of the micromachine chip from a micromachine substrate.
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