Auto-switching gas delivery system utilizing sub-atmospheric pressure gas supply vessels
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United States of America Patent
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Jun 24, 2003
Issued Date -
N/A
app pub date -
May 1, 2000
filing date -
Jul 16, 1999
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Expired
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Abstract
An auto-switching sub-atmospheric pressure gas delivery system, for dispensing gas to a gas-consuming process unit, e.g., a semiconductor manufacturing tool, without the occurrence of pressure spikes or flow perturbations.
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