Probe contract system having planarity adjustment mechanism
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jul 1, 2003
Grant Date -
May 16, 2002
app pub date -
Jun 20, 2001
filing date -
May 31, 2000
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A probe contact system is capable of adjusting distances between tips of the contactors and contact targets with simple and low cost mechanism. The probe contact system includes a contact substrate having a plurality of contactors thereon, a probe card for fixedly mounting the contact substrate, a conductive elastomer provided between the contact substrate and the probe card, a gap sensor for measuring a distance between the contact substrate and the contact targets, a probe card ring attached to a frame of the probe contact system for mechanically coupling the probe card to the frame, and a plurality of connection members for connecting the probe card to the probe card ring while adjusting a gap between the probe card and the probe card ring.
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