Feature quality in array fabrication
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Jul 1, 2003
Grant Date -
N/A
app pub date -
Jan 26, 2000
filing date -
Jan 26, 2000
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A method, and apparatus and computer program products for executing the method. The method includes obtaining a set of multiple images of a target feature location on an array of multiple features, each image of the set representing the target feature location following deposition of a corresponding sub-set of multiple droplets for that feature. An overlay composite may be generated from the image set. The overlay composite may be used as a quality control tool, or in interrogating the array or processing results of the interrogation.
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