Pressure transducer with compensation for thermal transients

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United States of America Patent

PATENT NO 6588280
SERIAL NO

10127630

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method is disclosed for providing transient temperature compensation in a pressure transducer. The transducer includes a capacitive pressure sensor, the pressure sensor including a diaphragm, at least part of the diaphragm moving in response to changes in a pressure. The transducer may further include an electronic circuit which generates an uncompensated output signal representative of the pressure. The disclosed method generates a compensated output signal according to a function of the uncompensated output signal and a difference between a temperature of the pressure sensor and a temperature of the ambient environment.

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Patent Owner(s)

  • MKS INSTRUMENTS, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Mathew, Santhi E Londonderry, MA 6 76
Mindlin, Leonid South Natick, MA 8 130
Poulin, James M Derry, NH 6 71
Quigley, Claudia J Lexington, MA 9 144

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